Medium - Energy Ion Scattering ( MEIS :. . .
with channeling and blocking is a quantitative, real space, nondestructive technique for studyingthe composition and structure of surfices and interfaces buried up to a fav atomic layers below the surface. Single - crystal or epit axial samples are required for the structural determinations. The basic quantities measured are the energy and angular distribution of back scattered ions in the 50 - 400 keV range.
... [مشاهده متن کامل]
The technique has elemental and depth sensitivity.
The ion angular distributions are characterized by minima ( dips ) in intensity, the positions of which are closely connected to the relative positions of atoms in the surface layer.
MEIS is more surfice sensitive, and more complex instrumentally than other surfice ion spectroscopies, though interpretation is straight forward. The technique is useful for the analysis of all ultra high vacuum UHV compatible solids, and in particular metals, semiconductors, and overlayers on such surfaces ( submonolayer adsorbate concentrations, thin films of silicides, etc. ) .
